Temperature control curve

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• Real-time monitoring of temperature points 1~3 points
• Stable monitoring of temperature changes in the process

Thin film resistance measurement

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• Take nine points to measure and calculate the average

Object impedance measurement

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Adhesion test

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Hundred Knife Test

Film thickness measurement _a-step

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Film thickness measurement _SEM

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Film thickness measurement _XRF

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Optical measurement _Spectrometer

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 T% & R% & Lab*量測 

Optical measurement _Ellipsometer

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 SiO2 & Nb2O5 & ITO….. n, k measurement