Single chamber self-rotating coating
- Power supply: DC, DC pulse, MF type
- Max Coating Area: OD 600*450 mm
- Sub temp: max~350 ℃
- Vertical Design
- Reactive Sputter by close loop control
- AR optical film, ITO film, metal oxide film, metal film... and other special coating materials
Vertical fifth-generation continuous line coating
- Power supply ： DC 、DC pulse、MF type
- Max Coating Area：1100 * 1400 mm
- Sub temp：max~350 ℃
- Vertical Design
- Reactive Sputter by close loop control
- AR optical film, ITO film, metal oxide film, metal film... and other special coating materials
Horizontal fifth-generation continuous line coating
- Power supply：DC 、DC pulse、MF type
- Max Coating Area：1100*1300 mm
- Sub temp. ：max~200 ℃
- Vertical Design
- Reactive Sputter by close loop control
- AR optical film, ITO film, metal oxide film, metal film... and other special coating materials